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MEMS, Tiny Products- 2.008 Design & Manufacturing II


Published By: Rajesh
Description: This PDF which is provided by Study India contains notes on MEMS, Tiny Products, 2.008 Design and Manufacturing II, Spring 2004, Department of Mechanical Engineering, Design and Manufacturing II, Spring 2004, MIT. These notes are based on Process Flow, Wet or dry?, Etching Issues - Anisotropy, Etching Issues - Selectivity, Bulk Micromachining, Dry etching, DRIE (Deep RIE), Deposition processes, Physical Vapor Deposition and Deposition Issues Conformality.

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Title:
MEMS, Tiny Products- 2.008 Design & Manufacturing II


Posted By:
Rajesh


Date:
12/31/2015 12:44:02 AM


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