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MEMS, Tiny Products


Published By: Rajesh
Description: This Mechanical Engineering folder contains MEMS, Tiny Products, 2.008 Design and Manufacturing II, Spring 2004, Department of Mechanical Engineering, Design and Manufacturing II, Spring 2004, MIT. This also contains Process Flow, Wet or dry?, Etching Issues - Anisotropy, Etching Issues - Selectivity, Bulk Micromachining, Dry etching, DRIE (Deep RIE), Deposition processes, Physical Vapor Deposition, Deposition Issues - Conformality

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Title:
MEMS, Tiny Products


Posted By:
Rajesh


Date:
12/31/2015 12:06:28 AM


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