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MEMS- Tiny Products- 2.008 Design & Manufacturing-II


Published By: Rajesh
Description: This PDF which is provided by Study India contains notes on MEMS- Tiny Products- 2.008 Design & Manufacturing-II, These notes are based on 2.008 Design and Manufacturing II, Spring 2004, Department of Mechanical Engineering, Design and Manufacturing II, Spring 2004, MIT, Process Flow, Wet or dry?, Etching Issues - Anisotropy, Etching Issues - Selectivity, Bulk Micromachining, Dry etching, DRIE (Deep RIE), Deposition processes, Physical Vapor Deposition and Deposition Issues Conformality

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Title:
MEMS- Tiny Products- 2.008 Design & Manufacturing-II


Posted By:
Rajesh


Date:
12/30/2015 2:27:11 AM


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